Home >> Industry Knowledge >> Nitrogen purification unit (nitrogen machine) and use of workflow
Nitrogen purification device physics using catalytic deoxidation process in addition to water so that pipe (pressure ≤ 0.5Mpa) purification of the nitrogen required to reach users of high-purity nitrogen, the nitrogen gas purification device is widely used in semiconductor manufacturing, pharmaceutical, chemical, metallurgy, the power sector and other industries.

First, the use of the environment

Temperature: 5 ℃ ~ 35 ℃
Relative humidity: 45% ~ 75%
Atmospheric pressure: 86Kpa ~ 106Kpa
Power: 380V ± 30V 50HZ ± 2HZ
Nitrogen purification plants to be disposed of at the interior of a smooth formation of the ground, not placed in the application environment or poor ventilation environment, open the doors and windows must be running to maintain a well-ventilated.

Second, security issues

1.31 user must provide three-phase five-wire system power supply (TN-S) system, if the three-phase four-wire system must be an additional ground electrode, the nitrogen gas purification plants to be safe and reliable grounding, grounding resistance <0.5 ohm.
1.32 Purification of nitrogen purification devices using hydrogenation Deoxidization, indoor open flame is prohibited there, renewable after the exhaust gas (containing nitrogen, moisture, trace hydrogen and oxygen) from outside to deal with local environmental requirements, discharged within 5m around no fire and the piling up of inflammable material.
1.33 is a product of nitrogen gas suffocation, do not allow direct discharge to the interior, is strictly prohibited in the nitrogen purification unit at the scene to rest, sleep, to prevent any eventuality.

Third, the technical characteristics of

1. Raw nitrogen

a) the oxygen content of ≤ 5 × 10-3
b) dew point ≤ -10 ℃
c) temperature ≤ 35 ℃
d) the pressure of ≤ 0.5 Mpa
e) dust concentration ≤ 3500 stars / L

2. Raw hydrogen

a) non-phosphorus, arsenic impurity
b) the pressure of 0.2 Mpa ≤ P ≤ 0.5 Mpa

3. Purified nitrogen

a) the oxygen content of ≤ 1 × 10-6
b) dew point ≤ -60 ℃
c) the pressure of <0.1 Mpa
d) maximum power consumption ≤ 10KW

4. Overall dimensions: (1850 × 1500 × 2500)

Fourth, structural characteristics and working principle

1. The whole nitrogen purification unit has a good capacity tightness and anti-pollution, heating installations in nitrogen purified heat-type structure, the introduction of modern container external insulation materials, heat a small, low energy consumption and pollution-free.
Process using double-entry process, to work for.
The use of the main pieces of cut-off valve valve, good reliability, long life.

2. The working principle

a) does not require activation of palladium catalyst based on the characteristics, there is only one container of bottled palladium catalyst, the use of its catalytic properties, hydrogenation of the feed gas to remove oxygen, water vapor generated (container temperature exceeds 100 ℃) with a large number of palladium catalyst to leave the surface of nitrogen into the dryer.
O2 + H2 pt H2O
b) into the dryer in the UOP (United States) 5A molecular sieve physical adsorption, nitrogen in the water, the two drying tower and the regeneration of rotation in order to achieve the purpose of continuous work.

3. Nitrogen purification unit process

Workflow; raw material of hydrogen into the pipeline by the flow meter along with the raw materials deaerator nitrogen, in the palladium catalyst fully combined to generate a large number of nitrogen vapor was taken away from the deaerator by the cooler gradually cooling, cold and dry by machine to eventually entered the room temperature after the drying tower, nitrogen in the water are physical adsorption and molecular sieve 5A removed by purified nitrogen export nitrogen valve points to the user process.
Regeneration process, some nitrogen to one-way valve before the valve was manually driven by another state in the regeneration of drying tower, At this point, the regeneration temperature drying tower rose 350 ℃, at this temperature, the molecular sieve 5A inhaled a lot of water energy, rapid escape from the molecular sieve, into the tower has been taken away from the molecular sieve of the high-purity nitrogen, the exhaust valve short, as the program's control, renewable drying tower to continue to access Pure (At this point Heater stop heating) so that cooling to room temperature so that when you switch into the work.
A tower can be 24 hours of continuous work, and the other renewable heating tower 10 hours a day, forced blowing cold for 14 hours, when cooled to room temperature, the manual switch or two tower dryers to work for.
Sampling valve on the pipeline have to connect micro-and micro-oxygen water detector instrument for testing.

Fifth, installation and commissioning

1. Installation

* Nitrogen purification plant should be placed on the formation of strong ground
* Connection with the purification of nitrogen into and out of control must be seamless steel pipe, no leaks.
* Connect the power cord should be checked at the scene before the power supply parameters and nitrogen purification devices must conform to the requirements. PE In the absence of dedicated lines, the scene must be 50 × 5, L = 2.5m at a vertical angle of the earth, and its top surface is lower than 200mm, in 50mm from the top angle of a Department of Welding of the 8 × 30 mm bolts for fastening copper grounding, grounding extreme nitrogen purification devices, with not less than 4mm square copper connection, less than 0.5 ohm resistors.
* Pipeline valves and installation of nitrogen purification system must be sealed well, as a result of vibration during transport and on-site even after the tube, such as suspected leakage phenomenon can be carried out on the gas leak detection system can be allowed to 0.5Mpa nitrogen, the pressure within 24 hours Table pointer down the value of less than 0.1Mpa

2. Debug

At the scene after the installation of pipelines, in line with the 1.2, 1.3 and 4.14, you can conduct on-site commissioning, At this point, the method can be activated manually a drying tower, as shown in table 1:

Table 1 desiccant activated

℃ heating temperature range and holding time (hours) gas flow rate m3 / h

At room temperature ~ 20,011
  200 ~ 25,023
  250 ~ 30,025
  300 ~ 35,033